To customers
in MEMS industry, we supply low energy surface coatings for anti-stiction
or anti-drift applications
Coating 1:
The coating is ideally suited for bulk-micromachined devices or surface
micromachined devices obtained from dry etch-release. This coating is
stable to as high as 400 oC in air.
Coating 2: the coating is designed for MEMS devices obtained
from aqueous HF etching. The coating possesses similarly thermal stability
as coating 1.
Coating 3: the coating is ideally suited for silicon based MEMS
devices from surface micromachining obtained from aqueous HF release
etch. It is optimized for exceptionally low surface energy (H2O contact
angle 110 - 125 degrees) and low friction coefficient (~0.01).
To try out, order Low-Background
functional glass slides for protein, antibody, peptide, or other microarrays!
low background slides
We also license low background surface coating technology
to BioMEMS (microfluidics and microarrays) manufacturers.
License procedure:
1) MSI will provide limited consultation at no charge
to discuss approaches of problem solving. At this stage both parties
enter into mutual CDA/NDA; 2) MSI will then provide low energy coatings
on customer's devices to develop protocol and demonstrate the elimination
of problem. Such sampling is at nominal cost; 3) MSI and customer will
enter into a contract NRE agreement to optimize the coating to customer's
specifications; 4) MSI will license its coating technology and/or supply
coating equipment to the customer and assist the customer in implementing
the technology; 5) MSI will continue to work with the licensee to monitor
any coating issue and make future coating technology from MSI available
to the licensee. |
